10.14489/td.2023.10.pp.038-048

2023, 10 October

DOI: 10.14489/td.2023.10.pp.038-048

Mihin S. O., Egorov D. N., Koshkur O. N., Romanov A. E.
TOPOLOGY OF MANUFACTURING A SORPTION-CAPACITIVE HUMIDITY SENSOR BASED ON THIN FILMS OBTAINED BY MICROARC OXIDATION AND MAGNETRON SPUTTERING
(pp. 38-48)

Abstract. The article describes the technological process of manufacturing a sorption-capacitive humidity sensor based on thin films of a sorbing moisture-sensitive layer implemented by microarc oxidation and a moisture-permeable electrode implemented by magnetron sputtering. The paper defines the technical requirements for the components of a sorption-capacitive humidity sensor. The electrical parameters of the moisture-sensitive layer are investigated depending on the component composition of the electrolyte and the modes of microarc oxidation. The geometrical parameters of the moisture-sensitive layer and the moisture-permeable electrode are presented, their structure and pore distribution are shown.

Keywords: dew point temperature converters, sorption-capacitive gas humidity sensor, magnetron sputtering, micro-arc oxidation, moisture-permeable electrodes, moisture-sensitive layer, porosity, sorbing layer, vacuum sputtering, partial vapor pressure.

+ - About the Authors Click to collapse

S. O. Mikhin (LLC Progress Plant of High-voltage Electronic Components, Ukhta, Russia) E-mail: Данный адрес e-mail защищен от спам-ботов, Вам необходимо включить Javascript для его просмотра.
D. N. Egorov (Ukhta State Technical University, Ukhta, Russia) E-mail: Данный адрес e-mail защищен от спам-ботов, Вам необходимо включить Javascript для его просмотра.
O. N. Koshkur (LLC Progress Plant of High-voltage Electronic Components, Ukhta, Russia) E-mail: Данный адрес e-mail защищен от спам-ботов, Вам необходимо включить Javascript для его просмотра.
A. E. Romanov (Progress Special Electronics LLC, St. Petersburg, Russia) E-mail: Данный адрес e-mail защищен от спам-ботов, Вам необходимо включить Javascript для его просмотра.

+ - References Click to collapse

1. Uzyakov R. N., Chirkov Yu. A., Kushnarenko V. M., Poyarkova E. V. (2019). The influence of unpredictable factors on corrosion damage to pipelines and equipment. Neftegazovoe delo, (6), 87 – 100. [in Russian language]
2. Technical Regulations of the Eurasian Economic Union “On the safety of natural combustible gas prepared for transportation and (or) use.” (2018). Moscow: AO «Kodeks». [in Russian language]
3. Plant of high-voltage electronic components "Progress". Retrieved from https://zvekprogress.ru/ (Accessed: 11.07.2023). [in Russian language]
4. Passport of the innovative development program of PJSC Gazprom until 2025. Retrieved from https://www.gazprom.ru/f/posts/97/653302/prir-passport-2018-2025.pdf (Accessed: 11.07.2023). [in Russian language]
5. Import substitution program for measuring equipment for 2022 – 2030. Retrieved from https://import-net.vniims.ru/upload/import.pdf (Accessed: 11.07.2023). [in Russian language]
6. Stover S. M. (1963). Hygrometer. US Patent No. 3075385.
7. Goodman P., Chlek D. J. (1970). A Device for Measuring Absolute Humidity. US Patent No. 3523244.
8. Panametrics product catalog. Retrieved from https://panametrics.nt-rt.ru/images/showcase/cataloguePanametrics.pdf?ysclid=ljxis59zsq88858961 (Accessed: 11.07.2023). [in Russian language]
9. Capacitive Humidity Converter Method of its Manufacture. (1982). JP Patent No. 57-3905. Vaisala.

+ - Purchase digital version of a single article Click to collapse

This article is available in electronic format (PDF).

The cost of a single article is 500 rubles. (including VAT 20%). After you place an order within a few days, you will receive following documents to your specified e-mail: account on payment and receipt to pay in the bank.

After depositing your payment on our bank account we send you file of the article by e-mail.

To order articles please copy the article doi:

10.14489/td.2023.10.pp.038-048

and fill out the form