10.14489/td.2017.04.pp.044-057

2017, 04 April

DOI: 10.14489/td.2017.04.pp.044-057

Zusman G. V.
MODERN MICROELECTROMECHANICAL TRANSMITTERS AND THEIR APPLICATION IN VIBRATION DIAGNOSTICS AND SOME OTHER AREAS
(pp. 44 - 57)

Abstract. MicroElectroMechanical Systems (MEMS) technologies can be used to produce structures, devices and systems on the scale of micrometers. Our goal is to closely look at MEMS and outline the main benefits and limitations of this cutting edge technology specifically for vibration diagnostics. Although there are many technologies available to miniaturize devices, the acronym MEMS is almost universally used to refer to all devices that are produced by micro fabrication or micromachining except Integrated Circuit or other conventional semiconductor devices. Micromachining is any process that deposits, etches or defines materials with minimum features measured in micrometers or less. The general field of miniaturization is known as other names as well, namely MicroSystems Technology (MST) which is popular in Europe, and MicroMachines which is popular in Asia. MEMS represent the combination of semiconductor processing and mechanical engineering, however at a very small scale. MEMS are the integration of mechanical elements such as sensors and actuators with electronics on a common silicon substrate through utilization of micro fabrication technology. In the most basic form, the sensors gather information from the environment through measuring mechanical, thermal, biological, chemical, optical, and magnetic phenomena; the electronics process the information derived from the sensors and hence direct the actuators to respond by moving, positioning, regulating, pumping, and filtering, in order to control the environment for some desired outcome or purpose. This paper presents the overview of MEMS accelerometer parameters important for vibration diagnostics and discusses some other MEMS applications as gyroscopes, frequency generators, microphones, micro engines, high frequency switches and filters, micro-optical systems, harvesters, DLP-technology and pressure sensors.

Keywords: microelectromechanical systems MEMS, vibration diagnostics.

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G. V. Zusman (JSC RII “Spectrum”, Moscow, Russia) E-mail: Данный адрес e-mail защищен от спам-ботов, Вам необходимо включить Javascript для его просмотра.

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