10.14489/td.2018.12.pp.038-043

2018, 12 December

DOI: 10.14489/td.2018.12.pp.038-043

Babadzhanov L. S., Babadzhanova M. L., Danelyan A. G.
FREQUENCY-INTERFERENCE SEMICONDUCTOR COATING THICKNESS GAUGE
(pp. 38-43)

Abstract. The article describes the semiconductor coating thickness gauge based on frequency-interference method, according to which the precise focus on the coating surface and on the boundary of the coating and base is carried out by achromatic interference fringe in the near infrared region, and the measurement of the linear size of the coating thickness is carried out by measuring the frequency of light pulses, which is created by the light pulse generator and depends on the optical length of the closed loop of the optical delay. The light pulse generator is constructed on an optical closed-loop closed by an optical length, into which the radiation of monochromatic infrared light enters, when this radiation is directed to the points that limit the coating thickness. The coating thickness is one of the elements of the closed loop and is connected with other elements of the circuit. The frequency that is generated by the light pulse generator depends on the optical length of the closed loop of the optical delay, and varies depending on the reconfiguration of the achromatic strip from the surface of the coating to the boundary with the base, and corresponds to the coating thickness. A schematic diagram of the thickness gauge, made using fiber optics, is shown. This scheme of the thickness gauge allows, with the appropriate settings, to carry out measurements of the coating thickness by two independent methods: interference and frequency-interference.The expected accuracy of the thickness gauge is 5…6 nm with a resolution of 0.001…0.004 nm.

Keywords: semiconductor coating thickness gauge, measurement, error, interference, light frequency, light polarization, light blanking.

+ - About the Authors Click to collapse

L. S. Babadzhanov, M. L. Babadzhanova, A. G. Danelyan (FGUP “VNIIMS”, Moscow, Russia) E-mail: Данный адрес e-mail защищен от спам-ботов, Вам необходимо включить Javascript для его просмотра. , Данный адрес e-mail защищен от спам-ботов, Вам необходимо включить Javascript для его просмотра. , Данный адрес e-mail защищен от спам-ботов, Вам необходимо включить Javascript для его просмотра.

+ - References Click to collapse

1. Babadzhanov L. S., Babadzhanova M. L. (2004). Metrological assurance of coating thickness measurements. Theory and practice. Moscow: Standartinform. [in Russian language]
2. Gavrilyuk V. K., Kontsevoy Yu. A., Oksanich A. P., Tuzovskiy A. M. (1978). Semiautomatic television microinter-ferometer "Monolayer-2". Elektronnaya promyshlennost', 66, pp. 18-20. [in Russian language]
3. Gavrilenko V. P., Kuzin A. Yu., Mityuhlyaev V. B. et al. (2015). Measurement of the thickness of the oxide film on the surface of silicon by the electronprobe method. Izmeritel'naya tekhnika, (9). [in Russian language]
4. Babadzhanov L. S., Magradze A. R. Setting the highest accuracy to reproduce the size of the coating thickness. Metrological Service in the USSR: Issue 3. VNIIKI. Мoscow. [in Russian language]
5. Darznek S. A., Zhelkobaev Zh., Kalendin V. V., Novikov Yu. A. (2006). Laser interferometric nanodisplacement meter. Tr. Instituta obschey fiziki im. A. M. Prohorova (RAN), 62, pp. 14-37. [in Russian language]
6. Danelyan A. G., Garibashvili D. I., Kankiya R. R. et al. (2009). On some possibilities for improving the metrological traceability of linear measurements in the nanometer range. Izmeritel'naya tekhnika, (11). [in Russian language]
7. Dmitriev S. A., Slepov N. N. (2010). Fiberoptic technology: current state and new perspectives. 3rd ed. Moscow: Tekhnosfera. [in Russian language]
8. Liokumovich L. B. (2007). Fiber optic interferometric measurements. Part 1. Fiberoptic interferometers. Saint Petersburg: Izdatel'stvo Politekhnicheskogo universiteta. [in Russian language].

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