10.14489/td.2023.10.pp.038-048

2023, 10 October

DOI: 10.14489/td.2023.10.pp.038-048

Mihin S. O., Egorov D. N., Koshkur O. N., Romanov A. E.
TOPOLOGY OF MANUFACTURING A SORPTION-CAPACITIVE HUMIDITY SENSOR BASED ON THIN FILMS OBTAINED BY MICROARC OXIDATION AND MAGNETRON SPUTTERING
(pp. 38-48)

Abstract. The article describes the technological process of manufacturing a sorption-capacitive humidity sensor based on thin films of a sorbing moisture-sensitive layer implemented by microarc oxidation and a moisture-permeable electrode implemented by magnetron sputtering. The paper defines the technical requirements for the components of a sorption-capacitive humidity sensor. The electrical parameters of the moisture-sensitive layer are investigated depending on the component composition of the electrolyte and the modes of microarc oxidation. The geometrical parameters of the moisture-sensitive layer and the moisture-permeable electrode are presented, their structure and pore distribution are shown.

Keywords: dew point temperature converters, sorption-capacitive gas humidity sensor, magnetron sputtering, micro-arc oxidation, moisture-permeable electrodes, moisture-sensitive layer, porosity, sorbing layer, vacuum sputtering, partial vapor pressure.

+ - About the Authors Click to collapse

S. O. Mikhin (LLC Progress Plant of High-voltage Electronic Components, Ukhta, Russia) E-mail: Данный адрес e-mail защищен от спам-ботов, Вам необходимо включить Javascript для его просмотра.
D. N. Egorov (Ukhta State Technical University, Ukhta, Russia) E-mail: Данный адрес e-mail защищен от спам-ботов, Вам необходимо включить Javascript для его просмотра.
O. N. Koshkur (LLC Progress Plant of High-voltage Electronic Components, Ukhta, Russia) E-mail: Данный адрес e-mail защищен от спам-ботов, Вам необходимо включить Javascript для его просмотра.
A. E. Romanov (Progress Special Electronics LLC, St. Petersburg, Russia) E-mail: Данный адрес e-mail защищен от спам-ботов, Вам необходимо включить Javascript для его просмотра.

+ - References Click to collapse

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DOI: 10.14489/td.2023.10.pp.038-048

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