10.14489/td.2025.09.pp.056-062

2025, 09 September

DOI: 10.14489/td.2025.09.pp.056-062

Mikhin S. O., Ganzha V. A., Koshkur O. N., Romanov A. E.
THIN-FILM SORPTION-CAPACITIVE SENSOR FOR MONITORING THE MOISTURE CONTENT OF GASEOUS MEDIA
(pp. 56-62)

Abstract. This research focuses on the development and testing of a sorption-capacitive sensor designed for monitoring the humidity levels in natural gas. The primary objective of the study is to innovate methods that reduce the thickness of the moisture-sensitive layer while enhancing the electrical performance of the sensor. A critical aspect addressed is the application of electrochemical anodization, which facilitates the creation of oxide films on aluminum substrates. This process leads to significant reductions in the tangent of the dielectric loss angle, improving the overall efficiency of the sensor. The constructed sensor consists of a porous moisture-sensitive layer, formulated through innovative techniques, enabling it to absorb and desorb moisture optimally in varying conditions. The study also examines the performance of titanium and its nitride as permeable electrodes, asserting their robust adhesion to the sensitive layers generated via anodization. Results demonstrate that the electrical characteristics of the sensors remain stable across a dew point temperature range from +20 to ‒100 ºC, indicating low levels of hysteresis and high reliability. The findings suggest that these sensors offer considerable promise for integration into the gas transportation system, thereby contributing to the effective monitoring and management of the gas supply while addressing challenges related to moisture content that can impact system integrity. Overall, this research underscores the importance of developing domestic technologies to manufacture advanced sensors, ensuring the sustainability and reliability of Russia’s gas infrastructure.

Keywords: electrical capacity, electrical resistance, moisture content of the gaseous medium, magnetron sputtering, electrochemical anodizing, moisture-permeable electrodes, moisture-sensitive layer, humidity sensor, tangent of the dielectric loss angle.

+ - About the Authors Click to collapse

S. O. Mikhin (Gazprom Transgaz Tomsk LLC, Sakhalin LPUMT Yuzhno-Sakhalinsk, Russia) E-mail: Данный адрес e-mail защищен от спам-ботов, Вам необходимо включить Javascript для его просмотра.
V. A. Ganzha (Siberian Federal University, Krasnoyarsk, Russia) E-mail: Данный адрес e-mail защищен от спам-ботов, Вам необходимо включить Javascript для его просмотра.
O. N. Koshkur (Progress Plant of High-voltage Electronic Components, Ukhta, village. Vodny, Russia) E-mail: Данный адрес e-mail защищен от спам-ботов, Вам необходимо включить Javascript для его просмотра.
A. E. Romanov (Progress Special Electronics LLC, Saint Petersburg, Russia) E-mail: Данный адрес e-mail защищен от спам-ботов, Вам необходимо включить Javascript для его просмотра.

+ - References Click to collapse

1. Energy Strategy of the Russian Federation until 2050. (2025). Approved by Order of the Government of the Russian Federation No. 908 dated April 12, 2025 [in Russian language].
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3. GOST 20060-2021. Natural gas. Determination of water dew point temperature. (2021). Gazprom VNIIGAZ LLC. [in Russian language]
4. Mikhin, S. O., Egorov, D. N., Koshkur, O. N., & Romanov, A. E. (2023). Topology of manufacturing a sorption-capacitive humidity sensor based on thin films obtained by micro-arc oxidation and magnetron sputtering. Kontrol'. Diagnostika, 26(10), 38–48. [in Russian language]
5. Mikhin, S. O., Egorov, D. N., Koshkur, M. O., et al. (2024). Thin-film sorption-capacitive humidity sensor (Patent No. RU 222946). [in Russian language]
6. Mikhin, S. O., Egorov, D. N., Koshkur, M. O., et al. (2024). Method for manufacturing a thin-film humidity sensor (Patent No. RU 2820096). [in Russian language]
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